Title:
VIBRATOR-MEASURING JIG
Document Type and Number:
Japanese Patent JPH1114678
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To significantly reduce a ground capacity in a vibratormeasuring jig for measuring a vibrator with a load capacity. SOLUTION: A connecting part R between a load capacity connection terminal P2 and a DUT (vibrator mount) connection terminal Q1 is surrounded by a guard G1 . The guard is connected to the neighborhood of a terminal (P point) opposite to a vibrator among connection terminals to a load capacity CL and kept at the same potential. A ground capacity which is present between the connecting part R and the ground is substantially incorporated parallel to the load capacity CL and transformed as part of the load capacity CL. Accordingly, an equivalent circuit model of a measuring system is simplified, so that highly accurate measurement results can be obtained with the use of a conventional equivalent constant calculation formula.
Inventors:
YANAGAWA KOICHI
Application Number:
JP16985597A
Publication Date:
January 22, 1999
Filing Date:
June 26, 1997
Export Citation:
Assignee:
HEWLETT PACKARD JAPAN LTD
International Classes:
G01R27/26; G01R29/22; H01L21/66; H03H3/02; (IPC1-7): G01R27/26; G01R29/22; H01L21/66; H03H3/02
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