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Title:
VISUAL EXAMINATION APPARATUS, VISUAL INSPECTION METHOD, PROGRAM FOR MAKING COMPUTER FUNCTION AS VISUAL INSPECTION APPARATUS, AND RECORDING MEDIUM
Document Type and Number:
Japanese Patent JP2006292615
Kind Code:
A
Abstract:

To provide a visual inspection apparatus for detecting defects, according to the accuracy requested.

Processing, executed by the visual examination apparatus, comprises a step (S402) for receiving the input of requested precision and images; steps (S404, S406) for extracting defect candidates and feature amount; a step (S408) for displaying the amount of feature; a step (S410) for receiving the input of labeling information; a step (S412) for executing the estimated processings of population distribution; a step (S414) for calculating the degree of overlapping among populations; a step (S416) for reading defect information; a step (S418) for calculating the precision; a step for starting learning, when an inputted image does not satisfy the requested precision (YES in S420); and a step (S422) for calculating learning information when the image does not satisfy the requested precision (NO in S420).


Inventors:
YAMAMOTO SHUHEI
Application Number:
JP2005115738A
Publication Date:
October 26, 2006
Filing Date:
April 13, 2005
Export Citation:
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Assignee:
SHARP KK
International Classes:
G01N21/956; G01B11/30; H01L21/66
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai