Title:
Volatile dihydropyrazinyl one and a dihydropyrazine metal complex
Document Type and Number:
Japanese Patent JP5918316
Kind Code:
B2
Abstract:
A composition comprising dihydropyrazinyl anions that can be coordinated as 6 electron ligands to a broad range of different metals to yield volatile metal complexes for ALD and CVD depositions are described herein. Also described herein are undeprotonated dihydropyrazines that can coordinate to metals as stabilizing neutral ligands. In one embodiment, the composition is used for the direct liquid injection delivery of the metal dihydropyrazinyl complex precursor to the chamber of an ALD or CVD chamber for the deposition of metal-containing thin films such as, for example, ruthenium or cobalt metal films.
Inventors:
Sergei Hulady Milofiti Ivanov
Shinjiang Ray
John Anthony Thomas Norman
Shinjiang Ray
John Anthony Thomas Norman
Application Number:
JP2014151758A
Publication Date:
May 18, 2016
Filing Date:
July 25, 2014
Export Citation:
Assignee:
AIR PRODUCTS AND CHEMICALS INCORPORATED
International Classes:
C23C16/18; C23C16/455; H01L21/285; H01L21/316
Domestic Patent References:
| JP2008516956A | ||||
| JP2006511716A | ||||
| JP2006257073A | ||||
| JP2005314414A |
Foreign References:
| US20120231611 | ||||
| US20060083857 | ||||
| US20090291208 | ||||
| US7064224 |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Kenji Kimura
Nobuo Sekine
Naori Kota
Satoshi Deno
Takashi Ishida
Tetsuji Koga
Kenji Kimura
Nobuo Sekine
Naori Kota
Satoshi Deno