Title:
金属及び金属含有フィルムの堆積のための揮発性先駆物質
Document Type and Number:
Japanese Patent JP3593051
Kind Code:
B2
Abstract:
This invention is directed to a group of novel homologous eight membered ring compounds having a metal, such as copper, reversibly bound in the ring and containing carbon, nitrogen, silicon and/or other metals. A structural representation of the compounds of this invention is shown below: wherein M and M' are each a metal such as Cu, Ag, Au and Ir; X and X' can be N or O; Y and Y' can be Si, C; Sn, Ge, or B; and Z and Z' can be C, N, or O. Substituents represented by R1, R2, R3, R4, R5, R6, R1', R2', R3', R4', R5', and R6' will vary depending on the ring atom to which they are attached. This invention is also directed to depositing metal and metal-containing films on a substrate, under ALD or CVD conditions, using the above novel compounds as precursors.
Inventors:
John Anthony Thomas Norman
David Allen Roberts
Morte the Furnia
David Allen Roberts
Morte the Furnia
Application Number:
JP2001104544A
Publication Date:
November 24, 2004
Filing Date:
April 03, 2001
Export Citation:
Assignee:
AIR PRODUCTS AND CHEMICALS INCORPORATED
International Classes:
C07F1/00; C07F1/08; C07F5/02; C07F7/10; C07F19/00; C23C16/18; H01L21/285; (IPC1-7): C07F19/00; C23C16/18; H01L21/285
Domestic Patent References:
| JP2272577A |
Other References:
Inorganica Chimica Acta (1996), Vol.241 No.2, p.9-10
Attorney, Agent or Firm:
Takashi Ishida
Jun Tsuruta
Fukumoto product
Masaya Nishiyama
Higuchi Souji
Jun Tsuruta
Fukumoto product
Masaya Nishiyama
Higuchi Souji