Title:
WAFER LOADING BOAT
Document Type and Number:
Japanese Patent JPS61251144
Kind Code:
A
Abstract:
PURPOSE:To avoid the flaw and contamination of the surface part of the edge and a crack of the edge of a wafer by providing at least 3 stoppers for one wafer on support rods. CONSTITUTION:Grooves 12a-12d are provided on support rods 1a-1d respectively. The grooves 12a and 12b and the grooves 12c and 12d support a wafer 2 with an inclination at the lower end part of its front side and the upper end part of its back side respectively. Therefore, when the wafer 2 is settled on the support rods 1a-1d, the wafer 2 is moved to the step parts of the grooves of the support rods 1a and 1b while being held nearly vertically and then the wafer 2 is moved to the direction of an arrow X while being inclined. To the contrary, when the wafer 2 is removed from the support rods 1a-1d, a completely reverse procedure is followed. With this constitution, a flaw, contamination or a crack of the surface part of the wafer 2 can be avoided.
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Inventors:
KAMIJO HIROYUKI
SHIRAI HIDEKI
SHIRAI HIDEKI
Application Number:
JP9310385A
Publication Date:
November 08, 1986
Filing Date:
April 30, 1985
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
H01L21/67; H01L21/673; H01L21/68; (IPC1-7): H01L21/68
Attorney, Agent or Firm:
Takehiko Suzue