Title:
ウェハの製造方法
Document Type and Number:
Japanese Patent JP4847836
Kind Code:
B2
Inventors:
Hiroaki Akagawa
Katsumi Goto
Katsumi Goto
Application Number:
JP2006267235A
Publication Date:
December 28, 2011
Filing Date:
September 29, 2006
Export Citation:
Assignee:
Kyocera Kinseki Co., Ltd.
International Classes:
C30B29/18; C30B33/00; H03H3/02
Domestic Patent References:
| JP2122617A | ||||
| JP2000327492A | ||||
| JP5279190A | ||||
| JP2000264786A |