Title:
WAFER MOUNTING TABLE
Document Type and Number:
Japanese Patent JP2023149659
Kind Code:
A
Abstract:
To improve thermal uniformity of a wafer and to prevent electrical discharge in a gas intermediate passage.SOLUTION: A wafer mounting table 10 includes: a ceramic plate 20 incorporating an electrode 22; a conductive plate 30 provided on a lower surface side of the ceramic plate 20; a conductive bonding layer 40 for bonding the ceramic plate 20 and the conductive plate 30; and a gas intermediate passage 50 provided at an interface between the conductive bonding layer 40 and the conductive plate 30; a plurality of gas supply passages 52 extending from the gas intermediate passage 50 to a wafer mounting surface 21 penetrating the conductive bonding layer 40 and the ceramic plate 20; and gas introduction passages 54 which are provided so as to penetrate the conductive plate 30 in a vertical direction and communicate with the gas intermediate passage 50, and the number of which is smaller than the number of the gas supply passages 52 communicating with the gas intermediate passage 50.SELECTED DRAWING: Figure 2
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Inventors:
INOUE SEIYA
KUNO TATSUYA
MORIOKA IKUHISA
KUNO TATSUYA
MORIOKA IKUHISA
Application Number:
JP2022058340A
Publication Date:
October 13, 2023
Filing Date:
March 31, 2022
Export Citation:
Assignee:
NGK INSULATORS LTD
International Classes:
H01L21/683; H02N13/00
Attorney, Agent or Firm:
Patent Attorney Corporation ITEC International Patent Office
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