To package wafers which have a plurality of sizes, with a single container.
A wafer packaging container 10 that packages a plurality of wafers 20 is provided with a cylindrical body 11, which has an opened upper edge and a closed lower edge, and which has an inner diameter larger than the largest outer diameter among the wafers 20 to be packaged, a cap 12 that covers freely at the upper edge of the body 11 to be capable of closing the opening, a stay 13 standing at the center of the bottom of the cylindrical body 11, cushions 14 made of an elastic material and each having a through-hole 15 for the stay 13 to pass through, and protecting sheets 16 each having a through-hole 17 for the stay 13 to pass through. As a result, by inserting the stay standing on the body into a hole opened on each wafer to be packaged, wafers of different sizes can all be packaged in a wafer packaging container of identical standard, and the running cost for the wafer packaging can be reduced by enhancing the interchargeability or general-purposeness of the wafer packaging container.
SHIMOISHI TOMOAKI
TSUBOI KAZUYA
SASAKI MASAKO
NUMAZAKI MASAHITO
AZUMA SHUICHIRO
OKINAGA TAKAYUKI
ENOMOTO USUKE
HITACHI ULSI SYS CO LTD