Title:
ウェハの研磨方法及びナノバブル循環型研磨装置
Document Type and Number:
Japanese Patent JP5703133
Kind Code:
B2
Inventors:
Shota Inato
Tokaibayashi Yoshihide
Tokaibayashi Yoshihide
Application Number:
JP2011122920A
Publication Date:
April 15, 2015
Filing Date:
May 31, 2011
Export Citation:
Assignee:
Kyocera Crystal Device Co., Ltd.
International Classes:
B24B37/00; B24B37/08; B24B57/02
Domestic Patent References:
| JP2009111095A | ||||
| JP2000198062A | ||||
| JP2011005584A | ||||
| JP10330132A | ||||
| JP2009141347A | ||||
| JP2002016025A | ||||
| JP2003136405A | ||||
| JP2007331088A | ||||
| JP246729A | ||||
| JP3131025A | ||||
| JP2000343390A | ||||
| JP2008103701A |
Foreign References:
| US6354921 |