To enhance the frequency characteristics of a signal by constituting a plurality of groups mutually connecting the outside conductor of the coaxial part of a coaxial type probe needle with a cable or a braided wire, and abutting the common ground signal of the coaxial type probe needle on a pad by a ground probe needle.

The outside conductor part 1a of a coaxial type probe needle making the probe needle of a signal line quickly transferring data and the outside conductor part 1b of the coaxial type probe needle making a probe needle for a signal ground signal coaxial are provided. A cable 4 shortly thickly connect the outermost edge parts of outside conductor parts 1a, 1b. The size of the illustrated loop is lessened. The edge part of the probe needle contacts on a pad 6, the pads 6a, 6b thereof are set for a signal, and the pad 6c is set for signal ground. The length of wiring for the processing of the signal ground of the outside conductor parts 1a, 1b of a coaxial cable is short, and noise margin can be improved.