Title:
ウェーハ回転保持装置
Document Type and Number:
Japanese Patent JP4111479
Kind Code:
B2
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Inventors:
Masato Tsuchiya
Shunichi Ogasawara
Hideyuki Murooka
Shunichi Ogasawara
Hideyuki Murooka
Application Number:
JP2000070063A
Publication Date:
July 02, 2008
Filing Date:
March 14, 2000
Export Citation:
Assignee:
Sanyasu Semiconductor Industry Co., Ltd.
International Classes:
B05D1/40; H01L21/683; B05C11/08; B05D7/00; H01L21/027; H01L21/68
Domestic Patent References:
| JP453684A | ||||
| JP6393127A | ||||
| JP11186133A | ||||
| JP6302508A |
Attorney, Agent or Firm:
Shinsuke Ishihara
Shoji Ishihara
Shoji Ishihara