Title:
振動緩衝掛止機構を備えるウエハ・コンテナ及び扉
Document Type and Number:
Japanese Patent JP4724667
Kind Code:
B2
Abstract:
A container for holding a plurality of wafers in an axially aligned, generally parallel spaced apart arrangement includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an open front. At least one wafer support is provided in the enclosure along with a kinematic coupling on the bottom of the enclosure. The container has a door for sealingly closing the open front which includes a chassis and an operable latching mechanism on the chassis. The latching mechanism includes a cam selectively rotatable to shift the latching mechanism between a first favored position and a second favored position and at least one vibration dampener for dampening vibrations generated when the latching mechanism is shifted between the first and second favored positions.
Inventors:
Barnes, John
Fuller, Matthew A.
King, Jeffrey Jay.
Forbes, Martin Elle.
Smith, Mark Buoy.
Fuller, Matthew A.
King, Jeffrey Jay.
Forbes, Martin Elle.
Smith, Mark Buoy.
Application Number:
JP2006539704A
Publication Date:
July 13, 2011
Filing Date:
November 08, 2004
Export Citation:
Assignee:
Entegris Incorporated
International Classes:
H01L21/673; B65D45/06; B65D45/08; B65D85/00; E05B17/00; E05B63/14; E05B65/00; E05B65/02; E05B15/04; E05C9/04; F16F
Domestic Patent References:
| JP2005510858A | ||||
| JP11091865A | ||||
| JP4505234A |
Foreign References:
| WO2003059771A1 |
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda
Makoto Onda