PURPOSE: To prevent dirt from sticking to a wafer by constituting a conveyor beam so as to be shifted horizontally and vertically with a cam having multiple circular arcs and a driven unit in the said wafer conveyor in the open region of a semiconductor production unit coater.
CONSTITUTION: A driven wheel 10 rotates a bar member 17 clockwise around a supporting point 11 to follow the circular arc of a large radius 5 at the joint section 6 of a small-radius section 4 and the large-radius section 5 of a cam 3 by the rotation of the cam 3. Thereby, a doglegged bar member 18 is rotated counter-clockwise around a fulcrum 19 to drive a bar member 21 and a doglegged bar 20. Then, a beam 1 is shifted vertically via a vertical guide member 22 and a lower beam 8. A bar member 7 is moved in accordance with the change of circular arcs 4, 5 of the cam 3, and it shifts the beam 1 horizontally via the horizontal motion of a lug 9. Accordingly, dirt is prevented from sticking to the wafer in the open region.
KAWASE NOBUO
TANAKA KEITOKU
MIYAKE TAKASHI
KAWAURA HIROSHI
CANON KK
| JPS5419674A | 1979-02-14 | |||
| JPS4996468A | 1974-09-12 |