Title:
廃液処理装置
Document Type and Number:
Japanese Patent JP7341611
Kind Code:
B2
Abstract:
To provide a waste liquid disposal apparatus that can reduce amounts of impurities included in waste liquid.SOLUTION: A waste liquid disposal apparatus, which disposes waste liquid including silicone, comprises: a waste liquid disposal tank comprising an inflow port into which waste liquid flows; a negative electrode being provided in the waste liquid disposal tank, which is negatively charged; a positive electrode being provided to face the negative electrode in the waste liquid disposal tank, which is positively charged; a carbon dioxide supply source that supplies carbon dioxide to waste liquid flowing into the waste liquid disposal tank; and a collection unit that collects waste liquid having the silicone removed therefrom from the waste liquid disposal tank. The collection unit comprises a flow passage connected to the waste liquid disposal tank, a suction unit being connected to the flow passage, which sucks the waste liquid in the waste liquid disposal tank, and a gas supply source that supplies a gas to the flow passage or to the suction unit.SELECTED DRAWING: Figure 1
Inventors:
Jun Suwano
Miki Yoshida
Miki Yoshida
Application Number:
JP2019230815A
Publication Date:
September 11, 2023
Filing Date:
December 20, 2019
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B01D57/02; H01L21/304; B03C5/02; B24B55/12; C02F1/20; C02F1/469; H01L21/301
Domestic Patent References:
| JP2015196148A | ||||
| JP2013119050A | ||||
| JP201649506A | ||||
| JP2013251435A | ||||
| JP2013121637A | ||||
| JP2006315099A | ||||
| JP5293471A |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano
Tomohiro Okamoto
Takahiro Kasahara
Hideaki Okamoto
Takayuki Okano