To provide an improved device for uniformly adhering an extremely small volume of water onto a base body.
This water deposition device has a moisture saturation section 12, deposition section 18 and passage section 16 formed by segmenting the inside atmosphere at least partially isolated from the ambient atmosphere. This moisture saturation section 12 has a water supplying section 10 and a steam reservoir 14. This deposition section 18 is provided with a base body gap for setting a transfer route to the base body through the chamber. This passage section 16 is communicated with the steam reservoir 14 and the chamber 18. A first heater is arranged in the water supplying section 10 and a second heater is arranged in the passage section 16. A controller is operatively connected to the first heater and the second heater. The wet bulb temp. and dry bulb temp. of the inside atmosphere in the chamber are detected by this controller. The first and second heaters are driven in a range below the prescribed temp. by the controller.
BARON ROBERT JOHN
TRAIN ROBERT MICHAEL
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