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Title:
WATER QUALITY EVALUATING METHOD AND APPARATUS
Document Type and Number:
Japanese Patent JP2013228320
Kind Code:
A
Abstract:

To provide a method and an apparatus that can evaluate water quality of ultrapure water by detecting an amine-based organic substance or the like contained in the ultrapure water in a short period of time with high accuracy.

In a water quality evaluating method, sample water is passed as an upward flow into a column 4 through a pipe 1, a valve 2 and heating means 3, and particles Si of a silicon material are filled in the column 4, and a flow rate of the upward flow is selected so that the particles Si of the silicon material form a fluidized bed, and water brought into contact with the particles Si of the silicon material is discharged through a pipe 5, a valve 6 and a flowmeter 7, and a portion of the water is dispensed by a pipe 8 branched from the pipe 7, measured for a hydrogen concentration by using a hydrogen concentration meter 9 and then discharged through a flowmeter 10, and water passing velocity into the column 4 is set to SV 100-10,000h-1.


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Inventors:
MORITA HIROSHI
IKEMIYA NORITO
Application Number:
JP2012101426A
Publication Date:
November 07, 2013
Filing Date:
April 26, 2012
Export Citation:
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Assignee:
KURITA WATER IND LTD
International Classes:
G01N33/18; G01N31/00
Attorney, Agent or Firm:
Tsuyoshi Shigeno