Title:
Wavelength conversion type spatial light modulation device
Document Type and Number:
Japanese Patent JP5947172
Kind Code:
B2
Abstract:
The device includes a spatial light modulation section 10 having a phase modulation plane 10a to which laser light L1 in a wavelength region longer than an ultraviolet region is input, and on which a phase of the laser light L1 is modulated at each of a plurality of two-dimensionally arrayed regions, to generate modulated laser light L2, a wavelength conversion section 20 having a light incident plane which receives the modulated laser light L2 output from the spatial light modulation section 10, and converting a wavelength of the modulated laser light L2 into a wavelength in the ultraviolet region, and an image transfer optical system 30 coupling the phase modulation plane of the spatial light modulation section 10 and the light incident plane of the wavelength conversion section 20, so as to be optically conjugate systems to each other. Thereby, a wavelength conversion type spatial light modulation device capable of outputting spatially phase-modulated ultraviolet laser light, and reducing influence onto the spatial light modulation section is realized.
Inventors:
Hiroshi Saito
Masatoshi Fujimoto
Shingo Oishi
Kenji Fukumitsu
Masatoshi Fujimoto
Shingo Oishi
Kenji Fukumitsu
Application Number:
JP2012205773A
Publication Date:
July 06, 2016
Filing Date:
September 19, 2012
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
G02F1/37; G02F1/061; G02F1/13
Domestic Patent References:
| JP2009294509A |
Other References:
M. Hacker, et al.,"Micromirror SLM for femtosecond pulse shaping in the ultraviolet",Applied Physics B,2003年 6月 2日,Vol.76,p.711-714
K. Hazu, et al.,"Spatial light modulator with an over-two-octave bandwidth from ultraviolet to near infrared",Optics Letters,2007年11月15日,Vol.32, No.22,p.3318-3320
P. Nuernberger, et al.,"Generation of shaped ultraviolet pulses at the third harmonic of titanium-sapphire femtosecond lase,Applied Physics B,2007年 7月14日,Vol.88,p.519-526
T. Tanigawa, et al.,"Spatial light modulator of 648 pixels with liquid crystal transparent from ultraviolet to near-infr,Optics Letters,2009年 6月 1日,Vol.34, No.11,p.1696-1698
K. Hazu, et al.,"Spatial light modulator with an over-two-octave bandwidth from ultraviolet to near infrared",Optics Letters,2007年11月15日,Vol.32, No.22,p.3318-3320
P. Nuernberger, et al.,"Generation of shaped ultraviolet pulses at the third harmonic of titanium-sapphire femtosecond lase,Applied Physics B,2007年 7月14日,Vol.88,p.519-526
T. Tanigawa, et al.,"Spatial light modulator of 648 pixels with liquid crystal transparent from ultraviolet to near-infr,Optics Letters,2009年 6月 1日,Vol.34, No.11,p.1696-1698
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Satoru Ishida
Shotaro Terasawa
Yoshiki Kuroki
Satoru Ishida
Shotaro Terasawa