Title:
WAVELENGTH VARIABLE INTERFERENCE FILTER, COLORIMETRIC SENSOR, COLORIMETRIC MODULE, AND METHOD OF MANUFACTURING THE WAVELENGTH VARIABLE INTERFERENCE FILTER
Document Type and Number:
Japanese Patent JP2011191474
Kind Code:
A
Abstract:
To provide a wavelength variable interference filter having a large spectral wavelength region and high transmittance and resolution of dispersed light, a colorimetric sensor, and a colorimetric module.
An etalon includes a pair of mirrors 56 and 57 facing each other and an electrostatic actuator for varying the gap between mirrors which is the interval between these mirrors. Each of the pair of mirrors 56 and 57 includes a plurality of dielectric films 551, and post members 552 that are disposed between these dielectric films 551, keeps the distance between the dielectric films 551 facing each other at a predetermined dimension, and forms an air layer 553 between the dielectric films 551 facing each other.
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Inventors:
FUNASAKA TSUKASA
Application Number:
JP2010057127A
Publication Date:
September 29, 2011
Filing Date:
March 15, 2010
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G02B26/00; B81B3/00; B81C1/00; G02B5/28; G01J3/26
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Kazuhiko Miyasaka
Osamu Suzawa
Kazuhiko Miyasaka