To provide a wavelength variable interference filter which has a high transmissivity and a high resolution even when the wavelength of emitted light is varied, and to provide a colorimetric sensor and a colorimetric module.
An etalon 5 includes: a first substrate 51; a second substrate 52 which is connected to the first substrate 51 and has a dislocation part 521 which has a movable part 522 and a connecting and holding part 523 which holds the movable part 522 movable in the direction opposite to the substrate; a fixed mirror 56 which is fixed on the first substrate 51; a movable mirror 57 fixed on a movable face 522A; a first electrostatic actuator 54 which is provided at the position enclosing the fixed mirror 56 and the movable mirror 57 and moves the movable part 522 in the direction opposite to the substrate by electrostatic suction force; and a second electrostatic actuator 55 which is provided at the position inside of the first electrostatic actuator 54 and enclosing the fixed mirror 56 and the movable mirror 57, and applies stress on the movable part 522 in the direction opposite to the dislocating direction.
FUNASAKA TSUKASA
Osamu Suzawa
Kazuhiko Miyasaka