WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS

Title:

WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS

Document Type and Number:

Japanese Patent JP2014106269

Kind Code:

A

Abstract:

To provide a wavelength variable interference filter in which contact between reflection films can be suppressed even when a gap dimension between the reflection films is decreased, and to provide an optical filter device, an optical module, and an electronic apparatus.

A wavelength variable interference filter 5 includes a fixed substrate 51, a movable substrate 52, a fixed reflection film 54 disposed on the fixed substrate 51, and a movable reflection film 55 disposed on the movable substrate 52 and opposing to the fixed reflection film 54. The fixed substrate 51 includes a reflection film setting surface 512A and an electrode setting groove 511 enclosing an outer circumference of the reflection film setting surface 512A. The fixed reflection film 54 is disposed from the reflection film setting surface 512A to the electrode setting groove 511.

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Inventors:

SAKASHITA YUKI
SHINTO SUSUMU

Application Number:

JP2012257156A

Publication Date:

June 09, 2014

Filing Date:

November 26, 2012

Export Citation:

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Assignee:

SEIKO EPSON CORP

International Classes:

G02B26/00; B81B3/00

Domestic Patent References:

JP2012220765A	2012-11-12
JP2012098505A	2012-05-24
JP2008102269A	2008-05-01

Attorney, Agent or Firm:

Masahiko Ueyanagi
Kazuhiko Miyasaka
Kazuaki Watanabe

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