Title:
WINDOW FOIL FOR TRANSMITTING ELECTRON BEAM
Document Type and Number:
Japanese Patent JPH1152099
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To obtain a window foil that is excellent in the transmissivity of an electron beam, has high mechanical strength and thermal conductivity and has no pinhole by covering the surface of a metal foil on the side of an irradiated atmosphere with a resin thin film made of a thermosetting resin. SOLUTION: A window foil 14a is formed by covering the surface of a metal foil 20 on the side of an irradiation atmosphere 16 with a resin thin film 22 made of a thermosetting resin. Constitutionally, the surface of the metal foil 20 on the side of a vacuum atmosphere 3 is not covered with the resin thin film 22 so as to secure heat conduction for a crosspiece supporting the window foil 14a and prevent an outgas from being released from the resin thin film 22 into the vacuum atmosphere 3. Consequently, the resin thin film 22 can be a reinforcement for the deterioration of mechanical strength due to the thinning of the metal foil 20 and can prevent vacuum leakage by filling a pinhole that will potentially be made by thinning down the metal fail 20.
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Inventors:
HOSHI YASUHISA
TANIGUCHI SHUICHI
MIZUSAWA KENICHI
SUZUKI TAKASHI
NISHIKIMI TOSHIRO
TANIGUCHI SHUICHI
MIZUSAWA KENICHI
SUZUKI TAKASHI
NISHIKIMI TOSHIRO
Application Number:
JP21989897A
Publication Date:
February 26, 1999
Filing Date:
July 31, 1997
Export Citation:
Assignee:
NISSIN HIGH VOLTAGE CO LTD
International Classes:
G21K5/00; G21K5/04; H01J33/04; (IPC1-7): G21K5/00; G21K5/04; H01J33/04
Attorney, Agent or Firm:
Keiji Yamamoto