Title:
ワイヤーソーのカッティング中に磁性不純物を連続的に除去するワイヤーソー装置及び方法
Document Type and Number:
Japanese Patent JP5706336
Kind Code:
B2
Abstract:
The invention provides a method and apparatus for removing magnetic or magnetized contaminants from a wiresaw cutting slurry during a wiresaw cutting process. The apparatus comprises a recirculating slurry dispensing system that defines the slurry flow pathway. The recirculating dispensing slurry system comprises a magnetic separator for removing magnetic or magnetizable contaminants from the slurry, wherein the purified slurry is discharged back into recirculation within the recirculating slurry dispensing system.
Inventors:
Stephen Gramvine
Ramas Bramanham Nagarajan
Ramas Bramanham Nagarajan
Application Number:
JP2011542523A
Publication Date:
April 22, 2015
Filing Date:
December 21, 2009
Export Citation:
Assignee:
CABOT MICROELECTRONICS CORPORATION
International Classes:
B24B57/02; B24B27/06; H01L21/304
Domestic Patent References:
| JP2019460U | ||||
| JP2002036113A |
Attorney, Agent or Firm:
Atsushi Aoki
Tetsuro Shimada
Shinji Mitsuhashi
Koichi Ito
Kentaro Ito
Tatsuki Sone
Tetsuro Shimada
Shinji Mitsuhashi
Koichi Ito
Kentaro Ito
Tatsuki Sone