Title:
WIRING FORMING METHOD OF SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS54163691
Kind Code:
A
Inventors:
KOSHIMIZU HIROSHI
Application Number:
JP7299878A
Publication Date:
December 26, 1979
Filing Date:
June 15, 1978
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H01L21/3213; H01L21/027; H01L21/28; H01L21/283; H01L21/306; (IPC1-7): H01L21/283; H01L21/306; H01L21/88