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Patent Searching and Data


Title:
WORK CARRIER DEVICE IN CLEANING DEVICE
Document Type and Number:
Japanese Patent JPH01236631
Kind Code:
A
Abstract:

PURPOSE: To enable a large sized work to be carried and cleaned up in stable state with high precision by a method wherein the work is individually fed to and held by a holder while both surfaces of the work are cleaned up efficiently with high precision by brush cleaning and chemical cleaning.

CONSTITUTION: A work 15 is carried by a rail 16, a holder 17 and a guide mechanism 18 while the work 15 can be smoothly carried in stable state producing no looseness when it is being polished by brush cleaning and chemical cleaning processes and causing no uneven polishing owing to a belt 22 disposed in tension in the guide mechanism 18 as well as guide rollers 23, 24. At this time, the holder 17 is formed taking L-shape with a riser 17a to individually hold the large sized work 15 with its peripheral part held by a clip however, the work 15 itself is acceptable, if only its inside part is cleaned up. Through these procedures, both surfaces of the large sized work 15 can be carried and cleaned up in stable state with high precision.


Inventors:
TAKAI KAORU
AKASAKI TSUNEO
UENO SATOSHI
Application Number:
JP2716788A
Publication Date:
September 21, 1989
Filing Date:
February 08, 1988
Export Citation:
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Assignee:
KOKUSAI DENPAN KK
International Classes:
H01L21/304; B08B3/08; (IPC1-7): B08B3/08; H01L21/304
Attorney, Agent or Firm:
Sadao Ito