Title:
WORK CLEANING METHOD AND ITS DEVICE
Document Type and Number:
Japanese Patent JP3930662
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To excellently clean a work by uniformly generating ions to collide with the work with respect to a vacuum chamber and the work.
SOLUTION: In a work cleaning method in which ions are generated by emitting the electron to the inert gas from an electronic source within a vacuum chamber 1, the generated ions are made to collide with a surface of a work 7, and the surface of the work 7 is cleaned, the electronic source is arranged in a long range opposite to the work 7 within the vacuum chamber 1, and the electron is emitted to the inert gas from the electronic source within the vacuum chamber 1 to uniformly generate the ions in the vacuum chamber 1.
Inventors:
Hirofumi Fujii
Application Number:
JP14692099A
Publication Date:
June 13, 2007
Filing Date:
May 26, 1999
Export Citation:
Assignee:
KABUSHIKI KAISHA KOBE SEIKO SHO
International Classes:
C23F4/00; H01L21/302; H01L21/3065; (IPC1-7): C23F4/00; H01L21/3065
Domestic Patent References:
| JP63020450A | ||||
| JP9231936A |
Attorney, Agent or Firm:
Toshio Yasuda