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Patent Searching and Data


Title:
WORKING LIQUID CLEANING SYSTEM
Document Type and Number:
Japanese Patent JP2014094431
Kind Code:
A
Abstract:

To provide a working liquid cleaning system capable of removing fine matters in line reliably.

A working liquid cleaning system comprises a supply tank 1 storing a working liquid, a circulation path 3 supplying the working fluid to a processing apparatus 2 and returning the working liquid used in the processing to the supply tank so as to circulate, a circulation pump 4 arranged in the circulation path 3 and supplying the working liquid to the processing apparatus 2 and a centrifugal separator 5 separating and removing fine matter included in the working liquid from the working liquid used in the process by centrifugal force. In the centrifugal separator 5, the input side 5a for the working liquid is connected to the side of the circulation pump, and the output side 5b for the working liquid after separation of fine matter is connected to the side of the processing apparatus. In the output side for the working liquid, a working liquid supply adjusting mechanism 6 is provided.


Inventors:
TAKAHASHI KAZUAKI
Application Number:
JP2012247407A
Publication Date:
May 22, 2014
Filing Date:
November 09, 2012
Export Citation:
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Assignee:
IND KK
International Classes:
B23Q11/00; B23H1/10; B24B57/00
Domestic Patent References:
JPH11138051A1999-05-25
JPH105512A1998-01-13
JP2010240831A2010-10-28
JP2008036734A2008-02-21
JP2011051055A2011-03-17
JP2013107164A2013-06-06
Foreign References:
US6162355A2000-12-19
US8211304B12012-07-03
Attorney, Agent or Firm:
Toshio Tsuruwaka