To finish the surface of a workpiece to be a flat surface in such a state that the workpiece is sliced from an ingot by involving the workpiece where flexure caused at the time of working exists intact in a solid body, and cutting the workpiece in the involved state.
A means for burying a workpiece 1 in a solid body 3 is adapted to throw in thermoplastic resin of a material solidified from a liquid body to have smaller coefficient of expansion and contraction to about the half of a bottomed cylindrical mold 4, a workpiece 1 is placed thereon in a floating manner, and further after the material is thrown in the bottomed cylindrical mold 4 and solidified, it is removed from the bottomed cylindrical mold. At the time of working the solid body 3, the outer periphery of the solid body 3 is provided with plural grooves for rotating the solid body 3. The workpiece 1 is thus buried in the solid body 3 and the outer periphery of the solid body 3 is provided with the grooves, whereby the need of providing a notch in the workpiece 1 which is a wafer is eliminated, and even if there is no notch, flattening can be performed.
Nishi, Kenichiro
Nukui, Mitsuru
Murai, Shiro
Nakajima, Kazuo
Wada, Toyohisa
