WORKPIECE TO BE PROCESSED DIVIDING SYSTEM, AND PELLET- SHIFTING APPARATUS

Title:

WORKPIECE TO BE PROCESSED DIVIDING SYSTEM, AND PELLET- SHIFTING APPARATUS

Document Type and Number:

Japanese Patent JP2000232080

Kind Code:

A

Abstract:

To eliminate the need for troublesome works and increase productivity, in steps of from cutting one of various workpieces to be processed such as CSP(chip size package) substrate to accommodating pellets into a pellet transfer tray.

This workpiece to be processed dividing apparatus includes a cutting device 11, at least, having a holder table 16 for holding a workpiece to be processed held by a holding member and a cutting means 19 for cutting the workpiece held in the table 16 into pellets, a shifter device 12 at least, having a shifter means for picking up the divided pellets from the holding member and shifting them into a transfer tray, and a link transfer means for transferring the divided pellets of the workpiece from the cutting device 11 to the shifter device 12.

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Inventors:

SEKIYA KAZUMA
MABASHI TAKAYUKI
NAMIOKA SHINICHI
HIDAKA TAKEO
YOSHII MASAHIRO

Application Number:

JP3279799A

Publication Date:

August 22, 2000

Filing Date:

February 10, 1999

Export Citation:

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Assignee:

DISCO ABRASIVE SYSTEMS LTD

International Classes:

B28D5/00; H01L21/00; H01L21/301; H01L21/78; H01L21/677; (IPC1-7): H01L21/301; H01L21/68

Attorney, Agent or Firm:

Isao Sasaki (1 person outside)

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