To display obtained spectra by converting into the values of the first-order rays with automatically setting the conditions for measuring the higher-order rays, in a state analysis using characteristic X-rays of higher-order diffraction.

The name of an element, characteristic X-ray type and diffraction order for state analysis are input to an input device 12. A measurement control device 11 reads the wavelength data of the first-order ray from a storage device 14, according to the characteristic X-ray type of a specified element to obtain the actual spectroscopic wavelength position and the measurement wavelength range, based on the diffraction order. Furthermore, the conditions of PHA in a WDS measuring system 8 are set, in such a way that only the X-ray signals of the specified diffraction order are sorted out. The measured spectra of higher-order diffraction line are converted into the values of the first-order line and are displayed on a display device 13.