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Title:
X-RAY ANALYZER AND WAVE HEIGHT PREDICTION PROGRAM
Document Type and Number:
Japanese Patent JP2023031101
Kind Code:
A
Abstract:
To measure the wave height value of an X-ray signal quickly with high accuracy, even when measuring a high count X-ray, irrespective of the type of an X-ray detector and the circuit configuration of a pre-amplifier.SOLUTION: The present invention comprises: an excitation radiation source; an X-ray detector; a pre-amplifier for outputting an analog signal; an AD converter for converting the analog signal into a digital signal; a signal detection unit for detecting incidence timing; a waveform conversion unit for converting the digital signal into a staircase wave that includes a rise part and a flat part before and after the rise; a waveform reshaping unit for generating a reshaped waveform that includes a level difference or a peak; a wave height value measurement unit for measuring a wave height value on the basis of the incidence timing and the level difference, etc.; a training unit for acquiring, using the incidence timing, a part of the staircase wave that includes the rise part, and generating, using training data that includes in plurality a set of the acquired part and the wave height value, a learning model having been trained for the relationship of these; and a wave height value prediction unit for acquiring, using the incidence timing, a part of the staircase waveform from the newly converted staircase waveform and calculating a predicted wave height value from the acquired part of staircase waveform and the learning model.SELECTED DRAWING: Figure 2

Inventors:
TADA TSUTOMU
Application Number:
JP2021136599A
Publication Date:
March 08, 2023
Filing Date:
August 24, 2021
Export Citation:
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Assignee:
RIGAKU DENKI CO LTD
International Classes:
G01T1/36; G01N23/223
Domestic Patent References:
JP2019066243A2019-04-25
JP2018091691A2018-06-14
JP2017512297A2017-05-18
Foreign References:
WO2021075345A12021-04-22
WO2018101133A12018-06-07
US20140197307A12014-07-17
CN107817514A2018-03-20
Attorney, Agent or Firm:
Patent Attorney Corporation Haruka International Patent Office