PURPOSE: To obtain an X-ray composite analysis device which is capable of implementing the X-ray diffraction, the fluorescent X-ray analysis and the measurement of the fluorescent EXAFS of a sample by making X-ray as a probe in the same measuring container, and capable of implementing the integrated analysis of the same portion of a thin film, the surface of the thin film, the interface, or the like.
CONSTITUTION: The incident X-ray beam 1 which passes a monochromator 14, and is beam-formed by a slit 2, and of which intensity is measured by an incident X-ray detector 3 is made incident on a sample 5 at a minute incident angle which is equal to or less than the total reflection critical angle, and the energy dependency and the X-ray diffraction of the fluorescent X-ray yield or the like of the sample are measured in the same measuring container. A sample table is provided with a moving mechanism in three directions, i.e., X--axis which is parallel to the surface of the sample, and Y-axis and Z-axis which are respectively normal to the surface of the sample, and Y-axis and Z-axis have a rotational mechanism respectively. The fluoresce generated from the sample 5 is measured by the respectively corresponding detectors, e.g. 12, 7, 8. A sample moving mechanism and an X-ray detecting system are controlled by a computer, and remotely controlled from the outside of the measuring container.
KONO MAKIKO
NAKANO ASAO
SUENAGA KAZUFUMI
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