Title:
X-RAY DETECTOR AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2017058171
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an X-ray detector in which a metal container and a beryllium foil can be bonded together so that the metal container inside can be sealed in high airtightness; and to provide a manufacturing method thereof.SOLUTION: An X-ray detector includes: a metal container storing inside a component for inspecting an X-ray, and having an opened incident port passable by the X-ray; a beryllium foil arranged in the covering state of the incident port, and passable by the X-ray; a window plate arranged on the metal container in the enclosing state of the periphery of the incident port, and using a metal having a thermal expansion coefficient equivalent to that of the beryllium foil as a material; and a metal joining material for joining airtightly the periphery of the beryllium foil with the window plate.SELECTED DRAWING: Figure 1
Inventors:
FUJII ATSUSHI
YAMADA MINORU
SHIMADA MASARU
SUWA MASAYA
YAMADA MINORU
SHIMADA MASARU
SUWA MASAYA
Application Number:
JP2015181461A
Publication Date:
March 23, 2017
Filing Date:
September 15, 2015
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
G01T1/18; B23K1/00; B23K1/19; B23K31/02; H01J47/06; H01L23/02
Attorney, Agent or Firm:
Hidekazu Miyoshi
Masakazu Ito
Masakazu Ito
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