Title:
X-RAY DETECTOR AND TWO-DIMENSIONAL SENSOR MATRIX ARRAY
Document Type and Number:
Japanese Patent JPH0945952
Kind Code:
A
Abstract:
To obtain an X-ray detector where an X-ray phosphor having improved sensitivity and resolution to X-rays is combined with a photoconductive layer.
A metal film is deposited on a substrate 1 and a lower electrode 2 is machined by a mask process and then na-Si 3, ia-Si 4 and pa-Si 5 are deposited thereon thus forming a photoconductor D of ina-Si. Subsequently, a conductive phosphor 6 is deposited to form an upper electrode. Furthermore, the pina-Si is machined insularly and an insulation film 7 is formed thereon. Finally, a conductive layer of Al is formed and provided, at the opposite ends thereof, with a wiring layer 8 of Al thus constituting an X-ray detector.
Inventors:
WAKAGI MASATOSHI
ANDO MASAHIKO
WATANABE TAKESHI
MINEMURA TETSUO
ANDO MASAHIKO
WATANABE TAKESHI
MINEMURA TETSUO
Application Number:
JP19036395A
Publication Date:
February 14, 1997
Filing Date:
July 26, 1995
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G01T1/20; G03B42/02; H01L27/14; H01L27/146; H01L31/09; H05G1/26; (IPC1-7): H01L31/09; G01T1/20; G03B42/02; H01L27/14; H01L27/146; H05G1/26
Attorney, Agent or Firm:
Akio Takahashi (1 person outside)
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