To relieve the unevenness of the irradiated X-ray intensity distribution on the X-ray detection face of a secondary X-ray detector caused by the masking of X rays by a target of an X-ray tube.

In the equipment, an X-ray intensity-reduced region, where X rays are locally masked by the target of the X-ray tube 1 and the X-ray intensity is reduced as the whole X-ray beams XA are shaken by inclining the X-ray tube 1 only at the angle of inclination α to the X-ray detection face 2A of an FPD (a flat panel detector) 2, is moved outward on the X-ray detection face 2A, and an X-ray intensity-unreduced region, where the X-ray intensity is not substantially reduced, is moved in place of the X-ray intensity-reduced region which was moved outward. As a result, the ratio of the X-ray intensity-reduced region to cause the unevenness of the irradiated X-ray intensity distribution is reduced on the X-ray detection face 2A of the FPD 2.