Title:
X線発生装置及びX線分析装置
Document Type and Number:
Japanese Patent JP6478289
Kind Code:
B2
Abstract:
An X-ray generator including a cathode, an anode provided with two X-ray generation zones, a casing in which the cathode and anode are accommodated, two air cylinders for causing the anode to move, two linear guides for guiding the movement of the anode, and a bellows serving as a seal member. The air cylinders and the linear guides are provided at different positions on a surface orthogonal to a center axis of the bellows. The air cylinders and the linear guides are provided uniformly in relation to the center axis.
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Inventors:
Tomohiro Chaki
Manabu Noguchi
Manabu Noguchi
Application Number:
JP2016547798A
Publication Date:
March 06, 2019
Filing Date:
August 18, 2015
Export Citation:
Assignee:
Rigaku Corporation
International Classes:
H01J35/10; H01J35/28
Domestic Patent References:
| JP4423539Y1 | ||||
| JP343251U | ||||
| JP589809A | ||||
| JP2007525807A | ||||
| JP2008269933A |
Foreign References:
| US20100290594 | ||||
| DE102012203807A1 |
Attorney, Agent or Firm:
Kuniaki Yokokawa