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Patent Searching and Data


Title:
X-RAY GENERATOR
Document Type and Number:
Japanese Patent JPS5933742
Kind Code:
A
Abstract:

PURPOSE: To obtain an X-ray generator of the gas plasma type, which has a high X-ray producing efficiency and in which only a small amount of X-rays are absorbed and lost by gas, by enabling electric discharge gas and plasmas to be localized without using a special bulb.

CONSTITUTION: When a switch 36 is closed, a high electric field is applied to an ionic flow 31 flowing 31 flowing between electrodes 32 and 33 thereby causing electric discharge crossing the ionic flow 31. As a result, in this part, plasmas with high temperature develop, and at last, X-rays are generated. The thus generated X-rays are taken outside through, for example, an X-ray discharging window 301 made of beryllium. At this point, since the internal space of a plasma-producing chamber 30 is maintained highly vacuum, an extremely small proportion of X-rays are absorbed and lost by gas.


Inventors:
YAMABE MASAKI
FURUKAWA YASUO
OKABE MASAHIRO
KITAMURA YOSHITAKA
Application Number:
JP14286982A
Publication Date:
February 23, 1984
Filing Date:
August 18, 1982
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01J35/22; G03F7/20; H01L21/027; H05G2/00; (IPC1-7): H01L21/30
Attorney, Agent or Firm:
Koshiro Matsuoka