Title:
X線マッピング分析方法
Document Type and Number:
Japanese Patent JP4630490
Kind Code:
B2
Abstract:
In order to acquire typical X-ray spectra by dividing automatically dividing contained matter and regions where the density thereof differs into groups in X-ray mapping analysis, measurement starts with the spectra database empty, a designated location within the sample is irradiated with a primary beam by the primary beam control means, the sample is irradiated with the primary beam for a fixed period of time in order to acquire a measurement spectrum, the X-ray spectrum obtained through measurement and X-ray spectra in the spectra database are compared by the X-ray comparison means, the X-ray spectrum obtained through measurement is added to the database when no matching X-ray spectra exists in the database, and measurement is repeated at a designated measurement point.
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Inventors:
Kiyoshi Hasegawa
Application Number:
JP2001173981A
Publication Date:
February 09, 2011
Filing Date:
June 08, 2001
Export Citation:
Assignee:
SII Nanotechnology Co., Ltd.
International Classes:
G01N23/223; G01N23/225; G01T1/36
Domestic Patent References:
| JP200046768A | ||||
| JP2000097884A | ||||
| JP6123718A | ||||
| JP11304732A | ||||
| JP63107848U | ||||
| JP11295246A |
Attorney, Agent or Firm:
Kentaro Kuhara
Noriaki Uchino
Nobuyuki Kimura
Noriaki Uchino
Nobuyuki Kimura