PURPOSE: To enable an X-rays generating substance to be supplied continuously by allowing an irradiation surface of a laser for excitation source and the X-rays generating substance to be movable relatively,

CONSTITUTION: A laser for excitation source 11 is oscillated from a laser device for excitation source 9 when generating an X-rays laser 12 and is irradiated in line shape to a guide 2a of an X-rays generation substance supply source 2 by collecting light using a light-collecting lens 4. At this irradiated part, the X-rays generating substance which is deposited on a guide 2a is turned into steam and plasma, thus enabling the X-rays laser 12 to be generated. The generated X-rays laser 12 is passed between on opening 5a and a charge particle deflection magnet 6 and is taken out of an X-rays take-out window 10 of a vacuum container 1. In this case, a deposition film on the guide 2a in a part where the laser for excitation source 11 is irradiated is turned into steam and then eliminated but a roller 2b is driven in an arrow direction 13 and then deposition of a new X-rays generating substance is supplied successively.