PURPOSE: To make a device in the caption small and thin by providing a moving piezo actuator on a moving base, and by providing a clamper at the position corresponding to the position of said moving piezo actuator.
CONSTITUTION: A fixed base 20 has a bottom plate 21 and an upper plate 22 provided together with said bottom plate 21 in a monolithical manner. A moving base 24 is movably positioned in XY directions on a support table 23 arranged on the bottom plate 21. On said moving base 24, two moving piezo actuators 25, 26 are provided at its both ends in the X direction, while two moving piezo actuator 27, 28 are provided at its both ends in the Y direction. On the tip ends of those moving piezo actuator 25, 26, 27, 28, clamped members 29, 30, 31, 32 having T shape are provided upside down. On the fixed base 20, two clamper 33, 34 are provided at its both ends in the X direction, while two clampers 35, 36 are provided at its both ends in the Y direction.
HASHIMOTO KAZUE
FUJII TERU
