XY θ THREE AXIS MOVING TABLE - Matsushita Electric Industrial Co., Ltd

Title:

XY θ THREE AXIS MOVING TABLE

Document Type and Number:

Japanese Patent JP3733808

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide a light and compact XY θ three axis moving table.
SOLUTION: The XY θ three axis moving table movable in three directions, X, Y directions and the direction of rotation around θ-axis, is provided with a first table 6A, a second table 6B and a third table 6C to be linearly moved in mutual parallel in a plane parallel to a base 2 and linearly driven by motors MA, MB, MC, respectively, a first sliding part sliding in the X direction, a second sliding part and a third sliding part sliding at a preset angle to the X direction arranged on the respective tables, and a moving table 11 joined to the first, second and third sliding parts via pin members 9A, 9B, 9C in a rotationally movable manner. The moving table 11 is moved in the direction of three axes by driving the motors MA, MB, MC and so the three-axis moving table comes to be lighter and compacter than a conventional laminated three axis moving table.

Inventors:

Yukiyama Hideyuki

Application Number:

JP30365499A

Publication Date:

January 11, 2006

Filing Date:

October 26, 1999

Export Citation:

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