Title:
酸化亜鉛系透明導電膜及びそれを用いた液晶ディスプレイ並びに酸化亜鉛系スパッタリングターゲット
Document Type and Number:
Japanese Patent JP4702126
Kind Code:
B2
Inventors:
Kentaro Utsumi
Hitoshi Iigusa
Toshihiro Mitsu
Yuichi Suzuki
Hitoshi Iigusa
Toshihiro Mitsu
Yuichi Suzuki
Application Number:
JP2006075463A
Publication Date:
June 15, 2011
Filing Date:
March 17, 2006
Export Citation:
Assignee:
Tosoh Corporation
International Classes:
H01B5/14; C04B35/453; C23C14/08
Domestic Patent References:
| JP11236219A | ||||
| JP62157618A | ||||
| JP6234521A | ||||
| JP10040740A | ||||
| JP2003346559A |