Title:
Abrasives and polishing methods
Document Type and Number:
Japanese Patent JP6340497
Kind Code:
B2
Inventors:
Yoichi Akagami
Takayuki Kusumi
Ryuta Nakamura
Koichi Kawahara
Toshimasa Suzuki
Seiichi Suda
Nobuhide Saito
Takayuki Kusumi
Ryuta Nakamura
Koichi Kawahara
Toshimasa Suzuki
Seiichi Suda
Nobuhide Saito
Application Number:
JP2014054845A
Publication Date:
June 13, 2018
Filing Date:
March 18, 2014
Export Citation:
Assignee:
Akita
Fine Ceramics Center
Saito Optical Co., Ltd.
Fine Ceramics Center
Saito Optical Co., Ltd.
International Classes:
C09K3/14; B24B1/00; H01L21/304
Domestic Patent References:
| JP2003277732A |
Foreign References:
| US6297159 |
Attorney, Agent or Firm:
Kenzo Fukuda
Shinichi Fukuda
Kyosuke Kato
Shinichi Fukuda
Kyosuke Kato