Title:
An accelerometer structure and its use
Document Type and Number:
Japanese Patent JP6144704
Kind Code:
B2
Abstract:
A MEMS-sensor structure comprising first means and second means coupled for double differential detection and positioned symmetrically to provide quantities for the double differential detection in a phase shift. If the sensor deforms, due to a specifically symmetric positioning of the first and second means, the effect of the displacement is at least partly eliminated.
More Like This:
| JP7078081 | Low noise multi-axis MEMS accelerometer |
| JP2000329787 | DYNAMIC AMOUNT SENSOR AND WAFER ASSEMBLY |
| JP2007024668 | SENSOR AND ELECTRONIC DEVICE USING IT |
Inventors:
Littekonen, Ville-Pecca
Rothier, Leif
Bromkuvist, Anssi
Rothier, Leif
Bromkuvist, Anssi
Application Number:
JP2014551657A
Publication Date:
June 07, 2017
Filing Date:
January 11, 2013
Export Citation:
Assignee:
Murata Electronics Yusuke Sakura
International Classes:
G01P15/125; G01P15/08; G01P15/18; H01L29/84
Domestic Patent References:
| JP2011247812A | ||||
| JP2010238921A | ||||
| JP201038903A |
Foreign References:
| US20110030472 | ||||
| US20080158370 |
Attorney, Agent or Firm:
Takashima Ichi
Kyoko Doi
Mitsunori Kamata
Yaeko Tamura
Murata Miyuki
Junzo Koike
Hirofumi Toma
Kyoko Doi
Mitsunori Kamata
Yaeko Tamura
Murata Miyuki
Junzo Koike
Hirofumi Toma