脂環式不飽和化合物、重合体、化学増幅レジスト組成物、及び該組成物を用いたパターン形成方法

Title:

脂環式不飽和化合物、重合体、化学増幅レジスト組成物、及び該組成物を用いたパターン形成方法

Document Type and Number:

Japanese Patent JP4438924

Kind Code:

B2

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Inventors:

Katsumi Maeda
Kaichiro Nakano

Application Number:

JP2003020268A

Publication Date:

March 24, 2010

Filing Date:

January 29, 2003

Export Citation:

Assignee:

NEC

International Classes:

C08F32/00; G03F7/039; C07C33/44; H01L21/027

Domestic Patent References:

JP2005518476A

Attorney, Agent or Firm:

Akio Miyazaki
Masaaki Ogata
Ishibashi Masayuki

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