Title:
フルオロアルカンスルホン酸アンモニウム塩類およびその製造方法
Document Type and Number:
Japanese Patent JP5549288
Kind Code:
B2
Abstract:
When sulfinating a carboxylic acid bromofluoroalkyl ester by using a sulfinating agent, an organic base is used, thereby obtaining a fluoroalkanesulfinic acid ammonium salt. This is oxidized to obtain a fluoroalkanesulfonic acid ammonium salt. This is used as the raw material and is converted to an onium salt or is converted to an onium salt by going through saponification and esterification, thereby obtaining a fluoroalkanesulfonic acid onium salt. This fluoroalkanesulfonic acid onium salt is useful as a photoacid generator used for chemically amplified resist materials, etc.
Inventors:
Masashi Nagamori
Hagiwara Warrior
Takeshi Masubuchi
Satoshi Narizuka
Hagiwara Warrior
Takeshi Masubuchi
Satoshi Narizuka
Application Number:
JP2010054088A
Publication Date:
July 16, 2014
Filing Date:
March 11, 2010
Export Citation:
Assignee:
Central Glass Co., Ltd.
International Classes:
C07C313/04; C07C211/05; C07C303/32; C07C309/12; C07C381/12; C07B61/00
Attorney, Agent or Firm:
Makoto Koide