Title:
SENSOR UTILIZING CHANGE IN ELECTROSTATIC CAPACITANCE
Document Type and Number:
Japanese Patent JP3043477
Kind Code:
B2
Abstract:
PURPOSE: To simplify the structure of a sensor utilizing a change in electrostatic capacitance and to enhance the detection sensitivity thereof.
CONSTITUTION: A flexible substrate 60, a control substrate 70 and a fixed substrate 80 are bonded. The flexible substrate 60 consists of a center block-shaped acting part 61, an outer peripheral frame-shaped fixed part 63 and the bridge shaped beams 62 connecting both parts 61, 63 at four places. Spaces are formed by the groove D2 formed to the upper surface of the control substrate 70 and the groove D3 formed to the rear surface of the fixed substrate 80 and the acting part 61 becomes a suspended state under environment such that the periphery thereof is surrounded. Displacement electrodes 21, 23, 25 are formed to the upper surface of the acting part 61 and a fixed electrode 11 is formed to the rear surface of the fixed substrate 80. When acceleration acts on the acting part 61, the bridge-shaped beams 62 are bent and the acting part 61 is displaced and the distances between the respective electrodes are also changed. The acted acceleration can be detected on the basis of a change in the electrostatic capacitance of the capacitance element constituted of the respective electrodes.
Inventors:
Kazuhiro Okada
Application Number:
JP20387591A
Publication Date:
May 22, 2000
Filing Date:
July 17, 1991
Export Citation:
Assignee:
Kazuhiro Okada
International Classes:
G01L1/14; G01L9/12; G01P15/125; G01P15/18; G01R33/02; (IPC1-7): G01P15/125; G01L1/14; G01L9/12; G01R33/02
Domestic Patent References:
| JP4361164A | ||||
| JP1263576A | ||||
| JP4351967A |
Other References:
【文献】米国特許4941354(US,A)
Attorney, Agent or Firm:
Hiroshi Shimura