Title:
ELECTROSTATIC CAPACITANCE TYPE HUMIDITY SENSOR
Document Type and Number:
Japanese Patent JP2023042417
Kind Code:
A
Abstract:
To provide an electrostatic capacitance type humidity sensor with excellent sensitivity.SOLUTION: An electrostatic capacitance type humidity sensor comprises a humidity sensitive layer, an electrode layer, and an insulation layer. The electrode layer and the insulation layer are laminated in this order from a humidity sensitive layer side, on a front face and a rear face of the humidity sensitive layer, respectively. In the respective electrode layers provided on the front face and the rear face of the humidity sensitive layer, a first electrode layer and a second electrode layer are laminated alternately, and in total three or more of these layers are laminated, wherein the first electrode layer comprises at least one kind selected from the group consisting of Ag, Cu, Fe, Zn, Ni, Co, Al, Sn, Cr, Mo, Mn, Mg, Au, Pt, Ti, Ru, Rh, Pd, Ir, oxides thereof, and alloys thereof, and the second electrode layer comprises at least one kind selected from the group consisting of Ag, Cu, Fe, Zn, Ni, Co, Al, Sn, Cr, Mo, Mn, Mg, Au, Pt, Ti, Ru, Rh, Pd, Ir, oxides thereof, and alloys thereof. Accordingly, in the electrostatic capacitance type humidity sensor, the first electrode layer and the second electrode layer are constituted of metal compositions of different kinds.SELECTED DRAWING: Figure 1
Inventors:
ARAKI TAKUTO
SUZUKI KOHEI
KUROSU MASATO
SUZUKI KOHEI
KUROSU MASATO
Application Number:
JP2021149700A
Publication Date:
March 27, 2023
Filing Date:
September 14, 2021
Export Citation:
Assignee:
NAT UNIV YOKOHAMA
International Classes:
G01N27/22
Attorney, Agent or Firm:
Axis International Patent Attorney Corporation