Title:
カソード
Document Type and Number:
Japanese Patent JP7133450
Kind Code:
B2
Abstract:
To provide a cathode which has a combined structure, has a long life, and can be stably used.SOLUTION: The cathode is used for an ion source for extracting an ion beam using gas. The cathode constituting the ion source includes: a cathode cap made of Ta, W, or Mo; a cathode repeller made of carbon and surrounding the cathode cap; and a support material sandwiched between the cathode cap and the cathode repeller and made of ceramic fiber.SELECTED DRAWING: Figure 1
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Inventors:
Takagi Shun
Application Number:
JP2018223338A
Publication Date:
September 08, 2022
Filing Date:
November 29, 2018
Export Citation:
Assignee:
IBIDEN CO.,LTD.
International Classes:
H01J27/20; H01J37/08
Domestic Patent References:
| JP2017500709A | ||||
| JP2005235604A | ||||
| JP2001167707A |
Attorney, Agent or Firm:
Patent Attorney Firm WisePlus