A charged particle beam device provided with a nano chip and a gas supply mechanism

Title:

A charged particle beam device provided with a nano chip and a gas supply mechanism

Document Type and Number:

Japanese Patent JP6138942

Kind Code:

B2

Inventors:

Noriaki Arai
Hiroyuki Muto
Yoshimi Kawanami

Application Number:

JP2015530725A

Publication Date:

May 31, 2017

Filing Date:

April 04, 2014

Export Citation:

Assignee:

Hitachi High-Technologies Corporation

International Classes:

H01J27/26; H01J37/08

Domestic Patent References:

JP2013054910A
JP2008140557A

Attorney, Agent or Firm:

Yuji Toda

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