Title:
A charged particle beam device, a reconstruction image processing system of a three-dimensional picture, a method
Document Type and Number:
Japanese Patent JP6272153
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To solve such a problem that high speed high accuracy alignment of transmission image is impossible for the wide sample, inclination angle conditions, in the reconstruction of three-dimensional image of a transmission image.SOLUTION: In an imaging sequence for inclining a sample at a predetermined angle step, and acquiring first through N-th images for every inclination angle, the sample is aligned based on the results of three-dimensional phase correlation of a first reverse projection line image volume, and a second reverse projection image volume, corresponding to a temporary second image when the sample is inclined by 1 step, and then a second reverse projection line image volume corresponding to the second image of the sample after the alignment is determined as the reconstruction data.
Inventors:
Norio Baba
Yoshihiko Tomonaga
Misuzu Baba
Takahito Hashimoto
Takafumi Shitsuji
Yoshihiko Tomonaga
Misuzu Baba
Takahito Hashimoto
Takafumi Shitsuji
Application Number:
JP2014119250A
Publication Date:
January 31, 2018
Filing Date:
June 10, 2014
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J37/22; G01N23/04; G01N23/225; H01J37/26; H01J37/28
Domestic Patent References:
| JP2005019218A | ||||
| JP2012119100A |
Foreign References:
| US20050029452 | ||||
| US20130234024 |
Attorney, Agent or Firm:
Shigemi Iwasaki